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Comparing Probing Handler Products

Comparing Wafer Prober Products

PRODUCT NAME PCP-103SL PCP-303N
PRODUCT IMAGE

PRODUCT NAME PCP-103SL PCP-303N
FEATURES
Development concept
Probing solution for the diced device WLCSP or Packaged Substrate (BGA, QFN, etc) by our original concept probing method.
Image Processing
XY Compensation (PFC original method) and Profiling perform Multi-die Probing by compensating the position shift by "warpage" or "sag" of film caused by film tension and dicer blade.

Record of Alignment success for customers' products is 100%. (In Japan)

Probing
Multi-area probing is available when more than two package substrates are on a film frame. Reconstructed wafer can be probed by the individual alignment.

Capable of Multi-TEG (more than 2 different kinds on a wafer), etc. by probing in a chip (Micro Probing).

Transfer section

The ring clamp method which is not affected by the influence of the sag of a film is used.

Quick Loader can reduce the Load/Unload time per sheet to half. (OP)
Chuck
  • Small chip less than 1mm is handled by minor diameter VAC holes.
  • Small chip less than 0.5mm can be handled. (OP)
  • Sandblast finish of chuck surface and chuck air-blow-mechanism improve the detachability from the chuck.
Supports the high temperature range 50 ℃ to 150 ℃ and precise thermal control 25℃±0.3℃. (OP)
Noise

Surface of the chuck: More than-80db (*1)

Low Vibration

High rigidity cabinet made by the iron surface plate and the welding frame

Non-magnetic
Non-magnetic spec is available for a magnetic device. (OP)(*2)
Common
  • Low cost, high throughput
  • Small space (footprint), power-saving design
  • Stable operation (more than MTBF5000 hours)
SPEC
Film Frame Size

2-8-1(φ200mm wafer)

Supports 2-6-1 by changing chuck (OP)

Supports Eco-ring and square ring (OP)

2-12(φ300mm wafer)

Supports 2-6-1 by changing chuck (OP)

Supports Eco-ring and square ring (OP)

Probing Area

Wafer:φ200mm

Max: (X)214mm, (Y)214mm

(※Contact us for detail)

Wafer:φ300mm 

Max: (X) 300mm, (Y) 300mm

XY Stage

Driven by linear motor (Repeat accuracy:1um)

Foot Print

Small space:

(W) 1200mm × (D) 860mm

Small space:

(W) 1615mm × (D) 1000mm

OTHERS
  • Total: PCP series more than 430 sets (As of April 2018)
  • We can respond to your request flexibly.
  • We can offer special price for the purchase of several sets together.

*1 Reference value: 30KHz to 30MHz Loop ANT measurement
*2 Reference value (standard system):Chuck surface: 0.04mT, Transporting rout: 0.2mT